Synthesis and characterization of Sn-doped TiO₂ thin films for biosensor application

TiO₂ a wide bandgap material has a great potential for use in semiconductor industry due to its better electronic properties combined with low cost, chemical stabilioty and non-toxicity. Further metal doping is found to modify the conductivity, electrical, and optical characteristics. In this research, deposition of Sn-doped TiO₂ was carriedout using the spray pyrolysis technique. The electrical properties were obtained by using the Hall effect technique and structural properties of the film were analyzed by X-ray diffraction and EDAX Scanning electron microscopy. The result of X-ray diffraction showed that the thin film deposited by spray pyrolysis is polycrystalline with preferential orientation in the direction of (002) fields. SEM analysis exhibited membrane structure for the thin film deposited by spray pyrolysis. The results of electrical conductivity were obtained by using the Hall effect technique.