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Spectroscopic characterization of RF hydrocarbon plasmas for DLC coatings

  • F. Guzmán
  • , M. Ruiz
  • , E. Valderrama
  • , M. Favre
  • , H. Bhuyan
  • , E. S. Wynham
  • , H. Chuaqui

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

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Physics