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Spacer-Defined Intrinsic Multiple Patterning
Sophia Katharine Laney, Tao Li, Martyna Michalska, Francisco Ramirez, Mark Portnoi, Junho Oh, Manish K. Tiwari, Iain G. Thayne, Ivan P. Parkin, Ioannis Papakonstantinou
Research output: Contribution to journal › Article › peer-review
7
Scopus
citations