Spacer-Defined Intrinsic Multiple Patterning

Sophia Katharine Laney, Tao Li, Martyna Michalska, Francisco Ramirez, Mark Portnoi, Junho Oh, Manish K. Tiwari, Iain G. Thayne, Ivan P. Parkin, Ioannis Papakonstantinou

Research output: Contribution to journalArticlepeer-review

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