MEMS-based micro-scale wind turbines as energy harvesters of the convective airflows in microelectronic circuits

Engineering

• Energy Engineering 100%
• Microelectromechanical System 100%
• Microelectronics 100%
• Micro Turbine 100%
• Harvester 100%
• Microscale 100%
• Convective 100%
• Microsystem 66%
• Power Supply 66%
• Experimental Result 33%
• Power Source 33%
• Silicon Technology 33%
• Mechanical Systems 33%
• Analytical Model 33%
• Surface Micro-Machining 33%
• Electric Generator 33%
• Proof-of-Concept 33%
• Operating Range 33%
• Energy Harvesting 33%

Keyphrases

• Energy Harvester 100%
• Airflow 100%
• Microturbine 100%
• MEMS-based 100%
• Micro Wind Turbine 100%
• Power Supply 66%
• Microsystems 66%
• Micromechanical Systems 33%
• Silicon Technology 33%
• Analytical Model 33%
• Blade Height 33%
• Prototype Concepts 33%
• Energy Scavenging 33%
• Electric Generator 33%
• Downscaling 33%
• Kinetic Energy 33%
• Surface Micromachining 33%
• Polysilicon 33%
• Alternative Power Source 33%
• Battery-free 33%
• PolyMUMPs 33%
• Operating Range 33%
• Wind Forcing 33%

INIS

• wind 100%
• energy 100%
• microelectronic circuits 100%
• wind turbines 100%
• air flow 100%
• turbines 100%
• power supplies 66%
• levels 33%
• length 33%
• power 33%
• range 33%
• surfaces 33%
• fabrication 33%
• design 33%
• devices 33%
• silicon 33%
• torque 33%
• scavenging 33%
• machining 33%
• electric generators 33%
• kinetic energy 33%