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Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma

  • P. Saikia
  • , H. Bhuyan
  • , D. E. Diaz-Droguett
  • , F. Guzman
  • , S. Mändl
  • , B. K. Saikia
  • , M. Favre
  • , J. R. Maze
  • , E. Wyndham

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

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Material Science